Aluminum nitride granule (ALN granule) is made by spray granulation of Aluminum nitride powder (ALN powder), containing binder and sintering aids, is raw material of high thermal conductivity ceramics,which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.